Thin Solid Films, Vol.518, No.21, 5938-5943, 2010
Structural, mechanical and tribological behavior of fullerene-like carbon film
Hydrogenated carbon films containing fullerene-like structures (FL-C:H) were synthesized using magnetron sputtering of a graphite target in methane and argon atmospheres The results indicate clearly that a substantial part of the film is made up of fragments of such fullerene-like structures mixed in a hydrogenated amorphous carbon matrix. The film exhibits excellent mechanical properties with a hardness of 27.4 GPa and almost complete elastic recovery (as high as 95%) The tribological properties of the FL-C.H film were tested and compared with a-C.H and a-C films The results show that the lowest friction coefficient of the FL-C H film, about 0 02, is recorded in oxygen environment The ranges of dispersion of the friction coefficient for the FL-C.H film are merely 002 in different testing environments, much lower than that of a-C:H and a-C films, which indicates the friction-coefficient-insensitivity of the FL-C.H film to different atmospheres. (C) 2010 Elsevier B V. All rights reserved
Keywords:Structural properties;Mechanical properties;Carbon films;Fullerene-like;Tribological properties;Magnetron sputtering;Transmission electron microscopy