Epitaxial perovskite (Ba0.7Sr0.3)TiO3 (BST), Ba(Zr0.2Ti0.8)O-3 (BZT), Ba(Zr0.2Ti0.8)O-3/(Ba0.7Sr0.3)TiO3(BZT/BST) and Ba0.85Sr0.15Zr0.1Ti0.9O3 (BSZT) thin films were grown on (LaAlO3)(0.3)(Sr2AlTaO6)(0.35) (LSAT)[001]single crystal substrate coated with conducting oxide LaNiO3(LNO) by pulsed laser deposition. X-ray diffraction, atomic force microscopy and electrical measurements were used to characterize the thin films. The theta-2 theta linear scan indicated that the thin films with LNO layer show (001) orientations perpendicular to the substrate. Smooth and dense surface with grain size of 30 nm-80 nm were observed. The relative permittivity of the BST, BZT/BST, BZT and BSZT thin films are 1101, 799, 584 and 1784 respectively at 10 kHz. The tunability of the thin films are 39%, 32%, 44% and 60%. The results show that BSZT film has the highest tunability. (C) 2010 Elsevier B.V. All rights reserved.