(100) oriented Platinum (Pt) thin films can be grown on MgO(100)/Fe buffer layers at a substrate temperature above 350 degrees C by using facing-targets sputtering (FTS) method. A diffusion of Fe atom from the Fe bottom layer to the top of the MgO layer was observed at a substrate temperature above 350 degrees C. Platinum layer with (100) preferred orientation can be grown above 250 degrees C by using a process which enhances the diffusion of Fe. (C) 2010 Elsevier B.V. All rights reserved.