Anatase phase titanium dioxide thin films have been deposited at various substrate temperatures by chemical spray pyrolysis of an aerosol of titanyl acetylacetonate. Deposited TiO2 films were nanocrystalline and preferentially oriented along [101] direction, uniform and adherent to the glass substrate. Best films processed at 450 degrees C were characterized to analyze its phase composition, texture, roughness, optical and electrical properties. X-ray photoelectron spectroscopy revealed that the surface of the film has only the Ti4+ cations to form perfect TiO2 stoichiometry with less amount of hydration. Atomic force microscopy image demonstrated the existence of homogeneous and rough surface, suitable for electrocatalytic applications. The film has an optical transmittance more than 90% and the refractive index of 2.07 was recorded at the wavelength 633 nm. Due to nano-sized grains, obtained optical band gap (3.65 eV) of the TiO2 thin film was larger than that of the bulk TiO2 (3.2 eV). Calculated porosity of the films 0.44, revealed the porous nature of the films. Hall measurements indicated that these materials are p-type and yield a carrier density of the order 8.8 x 10(20) cm(-3) and a carrier mobility of 0.48 x 10(-6) cm(2)/Vs. The dc electrical conductivity was therefore very low (8.91 x 10(-6)S/cm) because of lower value of mean free path of the charge carriers (4.36 x 10(-11) cm). It gives an impression that the process of spray pyrolysis provides an easy way to tailor make thin films possessing superior properties. (C) 2010 Elsevier B.V. All rights reserved.