ZnO nanofilms of (01 (1) over bar1) texture have been prepared by ion beam sputtering on the (001) surface of single-crystal NaCl. The orientation relationship between them is determined by transmission electron microscopy. Analyses of electron diffraction patterns and interface confirm that the ZnO (01 (1) over bar1) plane is the interface with the NaCl (001) surface. The photoluminescence spectrum from the ZnO (01 (1) over bar1) surface shows a near-band-edge UV emission and a broad green emission. The result indicates that the inherent high surface defects of oxygen vacancies on the (01 (1) over bar1) surface are the probable origin of the green emission. (C) 2010 Elsevier B.V. All rights reserved.