Hybrid deposition method was used to prepare CrNx/amorphous-WC (CrNx/a-WC) films The effect of the arc ion plating and direct current magnetron sputtering on the changes in microstructure and properties such as hardness and thermal stability were studied The amorphous WC phase of the CrNx/a-WC films was confirmed by X-ray photoelectron spectroscopy and high resolution transmission electron microscopy A bi-phase nanocomposite kinetic model and the Koehler s theory were used to explain the growth mechanism of CrNx/a-WC films A superhard superlattice Cr2N/a-WC film with hardness up to similar to 48 GPa was abtained The CrN/a WC films displayed better resistance to oxidation than pure CrN and CrN-based films As such CrNx/a WC nanocomposite films are very promising for high-speed drying machines and other high temperature applications (c) 2010 Elsevier B V All rights reserved