화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.9, 2601-2603, 2011
Analysis of systematic errors in Mueller matrix ellipsometry as a function of the retardance of the dual rotating compensators
A dual rotating compensator ellipsometer based on the optical PC1SC2A configuration described by Collins [1, chap. 7.3] has been developed. The systematic errors for this configuration if the compensators are quarter-wave plates have been already studied [2, 3, 4]. Smith [5] has demonstrated that the optimum retardance of a dual-rotating-retarder (DRR) instrument must be equal to 127 compared to the quarter-wave (90) retarders generally used. In this condition random errors are optimized. The aim of this work is to used such retarders and verify if the systematic errors due to uncertainties of the optical elements (i.e. analyzer, polarizer, first and second compensators) are improved too. For each optical element in different configurations like single or 4-zone average measurements, the systematic errors are given and compared according to the compensators. It is demonstrated that using a 127 instead of quarter-wave retarders coupled with 4-zone averaging measurement is the best configuration for this instrument. These results were confirmed by a statistical study. (C) 2010 Elsevier B.V. All rights reserved.