Variable angle spectrometric ellipsometry at room temperature is used to determine thin film parameters of substrates used in liquid crystal displays. These substrates consist of sequential thin films of polyimide (PI), on indium tin oxide (ITO),on SiO2 deposited on a glass backing approximately 1.1 mm thick. These films were studied by sequentially examining more complex systems of films (SiO2, SiO2-ITO, SiO2-ITO-PI). The SiO2 layer appears to be optically uniform and flat. The ITO film is difficult to characterize. When this surface film's lower surface is SiO2 and upper surface is an air-ITO-interface it is found that including surface roughness and variation of the optical properties with ITO thickness in the model improved the fit; suggesting that both phenomena exist in the ITO films. However, the surface roughness and graded nature of optical properties could be not determinable by ellipsometry when the ITO is coated with a polyimide film. The PI films are ellipsometrically flat and over the wavelength range from 500 to 1400 nm the real refractive index of polyimide films varying in thickness between 25 and 80 nm is well modeled by a two-term Cauchy model with no absorption. The ellipsometric thickness of the ITO layer is the same as the profilometric thickness: however, the ellipsometric thickness of the polyimide layers is roughly 10 nm larger than that obtained from the profilometer. These final observations are consistent with the literature. (c) 2011 Elsevier B.V. All rights reserved.