In this work, polymerization of meta-diethynyl benzene (MDEB) using iCVD is reported, which opens possibilities for use of polymers as a dielectric insulator in electronic applications that cannot be combined with solvent-based materials. iCVD is a solvent free production method, allowing the deposition of PMDEB layers at a rate of 12 nm/min. The polymers produced have a high molecular weight with a broad distribution (1000 to more than 25,000 g/mole) and a clearly defined Fourier transform infrared spectrum. The presence of a small peak at 2105 cm(-1) and a monomer peak in the gel permeation chromatogram (GPC) suggest that that some monomer is incorporated in the layers. (C) 2011 Published by Elsevier B.V.