화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.15, 5066-5069, 2011
Growth of nonpolar m-plane GaN epitaxial film on a lattice-matched (100) beta-LiGaO2 substrate by chemical vapor deposition
We report the growth of nonpolar GaN epitaxial films on nearly lattice-matched LiGaO2 substrate by a chemical vapor deposition (CVD) method. The structural, morphological and optical properties of GaN films were investigated by X-ray diffraction, scanning electron microscopy, transmission electron microscopy (TEM), atomic force microscopy, and photoluminescence (PL) measurements. We found that growth temperature plays an important role in the preparation of pure m-plane films by CVD method. Pure m-plane GaN was achieved by optimized growth condition. Epitaxial relationship was revealed by TEM study. The PL spectrum at room temperature has a strong near-band-edge emission at 3.41 eV and a weak yellow luminescence band. (C) 2011 Elsevier B.V. All rights reserved.