Carbon nanotubes were electrodeposited in acetonitrile solution at room temperature using Cu, and Fe-Ni nanoparticles as nucleation sites on HF-etched Si(100) wafer substrate. The electrochemical behavior of the deposition was investigated by voltammetry and chronoamperometry techniques. In order to obtain the optimum growth condition, the deposition critical parameters including current density range, potential and time were studied and calculated. Carbon nanotubes with approximate external diameter of 40-100 nm were fabricated under potentiostatic condition and diffusion control at -20 V in 4-6 h. The film crystallinity was investigated by means of X-ray diffraction and the tubes structure was revealed using scanning electron microscope and transmission electron microscope images. Raman spectroscopy was also employed to characterize the nanostructural features and single wall carbon nanotubes were detected. (C) 2011 Elsevier B.V. All rights reserved.