A high reflective bottom anode is essential for high-performance top-emitting organic light emitting devices (OLEDs). Ag has high reflectivity for visible light but its electronic properties are not ideal for anodes of OLEDs. Thus, we investigated the UV treatment effect of Ag film with a thin silver oxide layer at the surface for application of top-emitting OLEDs. In this study, we measured the change of potential difference between Ag film and ITO (indium tin oxide) films, according to UV treatment time and the mechanical properties by KPFM (Kelvin Probe Force Microscope) method and nano-indenter system, respectively. The KPFM and nano-indenter results show that the differences of surface potential and surface volume change according to UV treatment time. (C) 2011 Elsevier B.V. All rights reserved.