We report on our transmission electron microscopy study of dislocations and interfaces in CdTe solar cells. The atomic structure of dislocations formed inside CdTe grains have been determined by atomic-resolution transmission electron microscopy. We discuss the electronic properties of the dislocations and explore the effects of oxygen on the interdiffusion at CdS/CdTe interface. We find that the presence of oxygen in either CdS or CdTe suppresses the interdiffusion at the CdS/CdTe interface. We have further investigated interdiffusion at the CdS/Zn(2)SnO(4) interface. We find that Zn diffuses into CdS from Zn(2)SnO(4) and Cd diffuses into Zn(2)SnO(4) from CdS. The possible effects of the interdiffusion are discussed. Finally, we have examined the distribution of intentionally introduced Cu at the CdTe/CdS junction, and we find that Cu is distributed uniformly in the CdS layer. (C) 2011 Elsevier B.V. All rights reserved.