CdS layers deposited by radio frequency (RF) magnetron sputtering at different substrate temperatures and Close Space Sublimation (CSS) on SnO(2):F films have been investigated. Both types of films were prepared in the integrated ultra high-vacuum system known as DAISY-SOL and characterised with respect to crystal structure, texture, morphology, stoichiometry and optical properties. For this purpose, X-ray photoelectron spectroscopy, scanning electron microscopy, atomic force microscopy, X-ray diffraction and optical transmittance measurements were used in this work. The results show that RF sputtering produces dense and pin-hole free CdS layers with a more pronounced crystallographic texture, a cadmium excess and a higher optical absorption than those prepared by CSS. (C) 2011 Elsevier B.V. All rights reserved.