Polytetrafluoroethylene (PTFE)/Al, PTFE/Cu, and PTFE/Ti multilayer thin films have been deposited in order to investigate effects of interface energy on mechanical properties. PTFE, which has a low surface energy of 19.2 mJ/m(2), was used to introduce a large interface energy into multilayer thin films. PTFE thin film was deposited by rf magnetron sputtering using a PTFE sheet target. Al, Cu, and Ti were deposited by dc magnetron sputtering. The multilayer thin films were fabricated sequentially without breaking vacuum. Substrate used was aluminosilicate glass. The modulation period was changed from 6.7 to 200 nm. The total thickness was about 200 nm for all samples. The internal stress of metal layers changed from tensile to compressive and increased with decreasing modulation period for all of PTFE/Al, PTFE/Cu, and PTFE/Ti. Both hardness enhancement and superelasticity were observed in the results of nanoindentation measurements. The energy dissipated during nanoindentation process (one load and unload cycle) decreased with decreasing modulation period. The minimum value of the ratio of dissipated/loaded energy was <40%, which is smaller than the values obtained for monolithic PTFE or metal films (about 73% for PTFE and 87% for Al, 72% for Cu, and 71% for Ti, respectively). This meant that the PTFE/metal nano-multilayer thin films became more elastic with decreasing modulation period. The tendency of change in the mechanical properties strongly correlated to internal stress. Mechanisms involved in anomalous behaviors in film hardness and elasticity were discussed based on the relationship to interface energy, interface stress, and internal stress, induced by multilayering of the films. It is concluded that a large compressive stress introduced in the thin films increased the energy needed to deform elastically or plastically the thin film during indentation, resulting in the increase in hardness and elasticity. The nanoindentation analysis of the multilayer thin films emphasized that in PTFE/metal multilayer thin films mechanical properties of the films depend on interface stress induced by the accumulated interface energy, being independent of bulk materials properties composing thin films, resulting in increase in hardness and elasticity. (C) 2011 Elsevier B.V. All rights reserved.