Diamond-like carbon (DLC) films reinforced with single-walled carbon nanotubes (SWCNTs) were fabricated by sputter-deposition of DLC onto a few monolayers of spray-coated SWCNTs on glass substrates. The thickness-averaged internal stress was reduced by 15 GPa by incorporation of SWCNTs into 10-nm-thick DLC films. Stress analysis indicates that the internal stress is reduced by 1.8 GPa at the SWCNT-DLC nanocomposite layer and decreases exponentially as a function of film thickness. Microscopy reveals significant cracking and delamination in 150-nm-thick DLC films, while the SWCNT-reinforced films remain essentially intact. The results demonstrate that SWCNTs in DLC films influence the early stage of DLC film growth and act as an effective stress-buffering layer near the boundary between the film and substrate. (C) 2011 Elsevier B.V. All rights reserved.