Using dielectric spectroscopy analysis, three relaxation mechanisms have been identified in 60% semi-crystalline parylene AF4 ([-F2C-C6H4-CF2-](n)) fluoropolymers. At high temperature, fluorine species located at the electrode/polymer interface involve a space-charge polarization. beta-Process assigned to local molecular motions of the C-F dipoles and the gamma-relaxation due to local fluctuations of the F2C-C6H4 groups are also evidenced at intermediate and cryogenic temperatures respectively. Space-charge fluorine F-, beta and gamma relaxations obey an Arrhenius law against temperature with activation energy E-a (F-) = 1.26 eV, E-a (beta) = 0.59 eV and E-a (gamma) = 0.29 eV. (C) 2011 Elsevier B.V. All rights reserved.