화학공학소재연구정보센터
Thin Solid Films, Vol.520, No.8, 3402-3405, 2012
High dielectric constant terbium oxide (Tb2O3) dielectric deposited on strained-Si:C
High-k Tb2O3 films deposited on strained-Si:C and treated with different post-rapid thermal annealing temperatures were formed as alternative gate dielectrics in metal oxide semiconductor devices. The dielectrics were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, and electrical measurements. It was found that Tb2O3 dielectrics properly annealed at 800 degrees C form well-crystallized Tb2O3 structures with few defects. (c) 2011 Elsevier B.V. All rights reserved.