The structural and morphological transformations of TiO2 nanotube arrays (TNAs) treated by excimer laser annealing (ELA) were investigated as a function of the laser fluence using parallel and tilted modes. Results showed that the crystallinity of the ELA-treated TNAs reached only about 50% relative to that of TNAs treated by furnace anneal at 400 degrees C for 1 h. The phase transformation starts from the top surface of the TNAs with surface damage resulting from short penetration depth and limited one-dimensional heat transport from the surface to the bottom under extremely short pulse duration (25 ns) of the excimer laser. When a tilted mode was used, the crystallinity of TNAs treated by ELA at 85 degrees was increased to 90% relative to that by the furnace anneal. This can be attributed to the increased area of the laser energy interaction zone and better heat conduction to both ends of the TNAs. (c) 2011 Elsevier B.V. All rights reserved.