Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)

Brunet M; Kotb HM; Bouscayrol L; Scheid E; Andrieux M; Legros C; Schamm-Chardon S

Thin Solid Films, Vol.520, No.9, 3709-3709, 2012

DOI10.1016/j.tsf.2011.10.009 Export Citation

Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)

Brunet M, Kotb HM, Bouscayrol L, Scheid E, Andrieux M, Legros C, Schamm-Chardon S