ZnO nanorods were prepared by a spray pyrolysis technique on both as-received and etched Indium Tin Oxide (ITO)/glass substrates. The morphologies of the ITO substrates, the ZnO nucleation mechanism and the development of ZnO nanorods on both types of ITO substrates were investigated by Atomic Force Microscopy and Scanning Electron Microscopy methods. It was found that the amount of nucleation sites on as-received ITO is significantly higher compared to that on the etched ITO. As a result, well-shaped, elongated, strongly c-axis-oriented ZnO nanorods were obtained on the etched ITO/glass substrates. In contrast, randomly oriented ZnO nanocrystals with different shapes and sizes, as well as low aspect ratios, were obtained on the as-received substrates. It was found that ZnO nucleation follows the grain-boundary nucleation mechanism. (C) 2011 Elsevier B.V. All rights reserved.