Thin Solid Films, Vol.520, No.16, 5442-5446, 2012
Thermal properties of TiO2 films grown by atomic layer deposition
We study the thermal properties of amorphous TiO2 thin films of various thicknesses t, grown by atomic layer deposition. The thermo-optic coefficient dn/dT and the temperature coefficient d rho/dT of film density rho are determined from ellipsometric data in wavelength range 380
Keywords:Atomic layer deposition;Thermo-optic coefficient;Titanium oxide;Thin films;Optical materials