ZnO:Al nano-polycrystalline thin films were deposited by radio-frequency magnetron sputtering on glass substrates. The analysis of the morphology reveals well-connected whiskers with a preferred c-axis orientation perpendicular to the substrate and a dense columnar grain structure. The as-deposited films exhibited a low electrical resistivity of 1 x 10(-3) Omega cm. Annealing in air produces an increase of the resistivity by more than three orders of magnitude and an increase in the absolute value of the Seebeck coefficient proportional to the resistivity. Annealing of the as-deposited sample in reducing Ar/H-2 atmosphere leads to a decrease in both the resistivity and the absolute value of the Seebeck coefficient. The change in the electrical transport properties is caused by the absorption and desorption of oxygen. Both resistivity and Seebeck coefficient recover to their initial values during annealing of the air-treated sample in reducing Ar/H-2 atmosphere, indicating a reversible process. The analysis by transmission electron microscopy after annealing reveals a stable columnar grain structure with an increase of the grain size. The increase in grain size is larger when the sample is annealed in reducing rather than in oxidising atmosphere. In summary, the reducing Ar/H-2 atmosphere was found to be advantageous for the thermoelectric properties resulting in a maximum power factor of 0.3 mW/K(2)m at 800 K. (C) 2012 Elsevier B.V. All rights reserved.