An accurate theoretical model that quantifies the distribution of phonon density is indispensable for designing thermal resonators with high quality factor. This paper focuses on the modeling aspects of a generic cantilever structure excited thermally at resonance by applying Cattaneo-Vernotte hyperbolic heat conduction model. Critical analysis of the theoretical results revealed that the dynamic temperature oscillations at resonant frequencies are quantised wave responses whose characteristics ascribe to the quantum-mechanical behaviour of a particle inside a box. The theoretical predictions agree well with the experimental evaluation of the dynamic response of Al-SixNy bimaterial cantilever structure excited electrothermally by a signal with constant power spectral density. An increase in Q by a factor of 4-5 was achieved either by increasing the resonant frequency for a given length scale or by decreasing the length scale when excited by a signal with a constant power spectral density. This will enable to design micro/nano scale resonant devices with improved performance. (c) 2012 Elsevier Ltd. All rights reserved.