Carbonaceous deposits formation was established as the primary reason of Pd/TiO2 catalyst deactivation during reductive processing of CCl4 to form hydrodechlorination and oligomerization products. Three methods of carbonaceous deposits elimination were tested: (1) extraction by supercritical CO2, (2) oxidation by ozone in supercritical CO2, and (3) low-temperature glow-discharge oxygen plasma treatment. Synchronic thermal analysis confirms effective carbonaceous deposits removal during regeneration by ozone or low temperature glow-discharge oxygen plasma; by XPS deep oxidation of surface Pd after oxidative treatment (by ozone or oxygen plasma) was found. Thus H-2 reduction was proposed as the second step making possible full regeneration of initial catalytic activity of Pd/TiO2. (C) 2011 Elsevier B.V. All rights reserved.