FePt multilayer films were deposited on Si(1 0 0) substrate with thermally grown SiO2 film and sputtered Ag underlayer at room temperature by dc magnetron sputtering and subsequently annealing in vacuum. Experimental results suggest that proper thickness of Ag underlayer and slightly rich of Fe content can effectively induce the (0 0 1) texture of FePt films. A Fe57.4N42.6 thin film on the 8 nm Ag underlayer exhibits a large perpendicular coercivity of 7.6 kOe with magnetic remanence close to 1. (C) 2012 Elsevier Ltd. All rights reserved.