Advanced Materials, Vol.25, No.4, 552-558, 2013
On-Demand Patterning of Nanostructured Pentacene Transistors by Scanning Thermal Lithography
Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated.
Keywords:organic semiconductors;pentacene transistors;nanolithography;scanning thermal lithography;thermochemical lithography