The copper oxide films were deposited by decomposition of copper(II) acetylacetonate precursor in a hot wall horizontal flow tubular furnace by chemical vapor deposition method. The obtained data revealed change in phase of the deposits from crystalline copper(I) oxide (Cu2O) to copper(II) oxide (CuO) structures on increasing the substrate temperature from 195 to 430 A degrees C. The scanning electron microscope images showed the formation of mono-dispersed micron-sized Cu2O cubical structures. The Cu2O micro-cubes were observed to have a comparatively higher optical transmittance than CuO film in the visible spectral region. The Cu2O micro-cubical films are expected to underlie the potential use as cost effective transparent conducting oxide electrode in solar cell applications.