화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.96, No.3, 743-749, 2013
Crystallization Atmosphere and Substrate Effects on the Phase and Texture of Chemical Solution Deposited Strontium Niobate Thin Films
Strontium niobate (Sr:Nb=1:1) thin films were prepared via chemical solution deposition on (001)-oriented SrTiO3, (001)p-oriented LaAlO3, (0001)-oriented sapphire, and polycrystalline alumina substrates. Crystallization in oxygen at 1000 degrees C yielded Sr2Nb2O7 films on all substrates with strong (010) orientation. Films on LaAlO3 and SrTiO3 single-crystal substrates possessed a small amount of preferred in-plane orientation, whereas films prepared on sapphire and polycrystalline alumina substrates were fiber textured. Films crystallized at 900 degrees C in a low oxygen atmosphere (similar to 1021atm pO(2)) formed a randomly oriented polycrystalline perovskite, SrNbO3 on all substrates. A similar set of films crystallized at 900 degrees C at a slightly higher oxygen partial pressure (similar to 1015atm pO2) was comprised of Sr2Nb2O7 and SrNbO3 phases, exposing the dependence of phase formation on oxygen partial pressure. When subjected to a high-temperature anneal in oxygen, the SrNbO3 phase is shown to transform into Sr2Nb2O7, however, Sr2Nb2O7 did not significantly reverse transform into SrNbO3 after annealing in low oxygen partial pressure atmospheres.