The organozinc fluorocarboxylates RZnO2CRf and RZnO2CRf center dot TMEDA, along with Zn(O2CRf)(2)center dot TMEDA (R = Me, Et; R-f = C2F5, C3F7) have been synthesized. The structures of EtZnO2C2F5 (5), EtZnO2C3F7 (7), EtZnO2C2F5 center dot TMEDA (11), Zn(O2C2F5)(2)center dot TMEDA (13), along with products from the adventitious reaction with either O-2 or H2O, Zn10Me4(OMe)(4)(O2CC2F5)(12) (2), Zn9Et2(O2CC2F5)(12)(O)(2) (6), Zn8Et4(OEt)(4)(O2CC3F7)(6)(O) (8), [Zn(O2CC3F7)(2)center dot TMEDA](2)center dot H2O (15) have been determined. Thin films of oriented ZnO have been deposited on glass substrates by low-pressure chemical vapor deposition (LPCVD) using 3 and 10 as precursors, though no fluorine incorporation in the films was noted. LPCVD using 13 as precursor also yielded fluorine-free ZnO, but lacking the oriented growth observed using 3, 10. However, 5, which exhibits short intermolecular Zn center dot center dot center dot F contacts in the solid state, thermally decomposes to bulk ZnF2.