In this paper, we report on the synthesis of pure silica (SiO2) nano- and microwires by a non-catalytic process. The structure, morphology and properties of the products were examined by scanning electron microscopy, transmission electron microscopy, and energy dispersive spectroscopy. The microstructural analysis shows that the SiO2 wires are high purity silica and are completely amorphous; their diameter ranges from 70 nm to 2 mu m. The fiber length varies from 100 mu m to several mm. The wire manufacturing process involves reduced temperatures and times (1000 A degrees C, 30 min) compared to other processes, without needing any catalyst and has been carried out on different kinds of substrates (SiC and Si). Successful growth of SiO2 wires on the surface of silicon microcantilevers has been demonstrated; they could be used as an alternatively way to enhance the sensor performances.