화학공학소재연구정보센터
Industrial & Engineering Chemistry Research, Vol.52, No.40, 14328-14334, 2013
Characterization of Nanomechanical, Ferroelectric, and Piezoelectric Properties by Nanoindentation and Piezoresponse Force Microscopy of PbTiO3 Thin Films
Lead titanate PbTiO3 films were deposited onto Pt(111)/Ti/SiO2/Si(100) substrates by the aerosol assisted chemical vapor deposition (AA-CVD) process followed by thermal annealing at 550 degrees C for 12 h. Piezoresponse force microscopic observations revealed a nano laminar domain structure in the PbTiO3 grains, and we attribute the lamellar domains to 180 and 90 degrees ferroelectric domains. The polarization-switching mechanism of the domains in the representative PbTiO3 film under an external electric fields has also been studied, and it was revealed that a large-area polarization switching is usually accompanied by the appearance of a new direction of 90 degrees domains in order to reduce the stress in the grains. Finally, nanomechanical properties such as the elastic modulus and hardness were evaluated by nanoindentation using the continuous stiffness measurement technique.