화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.96, No.11, 3375-3378, 2013
Sol-Gel-Derived Amorphous-MgNb2O6 Thin Films for Transparent Microelectronics
In this work, transparent amorphous-MgNb2O6 thin films were fabricated on ITO/glass substrates using the sol-gel method. The change in the chemical states, as well as the optical and dielectric properties of MgNb2O6 films at various annealing temperatures is investigated. In this study, MgNb2O6 films exhibited the amorphous phase when the annealing temperature was below 600 degrees C. From X-ray photoelectron spectroscopy, the major parts of the films' chemical states can be indexed as Mg2+, Nb5+, Nb4+, and O2-. Furthermore, the Nb4+ element can be reduced at higher annealing temperatures. The average transmission percentage in the visible range (=400-800nm) is over 80% for all MgNb2O6/ITO/glass samples, whereas the optical band gap (E-g) for all samples is estimated at similar to 4eV. In addition, the dielectric constant was calculated to be higher than 20 under a 1MHz AC electric field, with a leakage current density below 2x10(-7)A/cm(2) at 1V. In this study, the fabrication procedure and experiment results of MgNb2O6 films are introduced for transparent microelectronics.