EIS has been acknowledged to be a powerful tool for investigating the kinetic mechanisms of charge transfer processes at electrode/solution interfaces. The method of using equivalent electrical circuits (EECs) has been most frequently used for interpreting measured EIS spectra. But the mechanistic information that this method can deliver is very limited. In this work, an alternative but innovative method, which combines the EECs and the mechanism analysis, is developed. With anodically polarized, oxide film covered titanium in NaF-containing perchloric acid solutions as an example, a detailed procedure is described and discussed for obtaining kinetic information (such as the rate constant, rate-determining step) from the results estimated by EECs. Two double-step mechanism models for anodized titanium are proposed and tested based on the strategy of the developing approach. (C) 2013 The Electrochemical Society. All rights reserved.