Characterization of the phase structure of proton exchanged channel waveguides in Z cut LiNbO3 using wet etching technique

Kichigin VI; Mushinsky SS; Petukhov IV; Minkin AM; Shevtsov DI; Oborin VA; Malinina LN; Salgaeva UO; Volyntsev AB

Materials Chemistry and Physics, Vol.142, No.2-3, 491-495, 2013

DOI10.1016/j.matchemphys.2013.07.040 Export Citation

Characterization of the phase structure of proton exchanged channel waveguides in Z cut LiNbO3 using wet etching technique

Kichigin VI, Mushinsky SS, Petukhov IV, Minkin AM, Shevtsov DI, Oborin VA, Malinina LN, Salgaeva UO, Volyntsev AB

We report the results of a systematic study of the structure of channel waveguides fabricated on Z cut LiNbO3 in benzoic acid melt. It was found that the proton-exchange region consists of three phases of HxLi1-xNbO3 solid solution. (C) 2013 Elsevier B.V. All rights reserved.

Keywords:Inorganic compounds;Etching;Microstructure;Optical properties