화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Chemical Engineering, Vol.31, No.4, 541-547, April, 2014
DOI10.1007/s11814-014-0050-2  Export Citation
Lithographically patterned micro-/nanostructures via colloidal lithography
Jin Young Park†
  • Department of Polymer Science and Engineering, Kyungpook National University, 80, Daehak-ro, Buk-gu, Daegu 702-701, Korea
E-mail:
Colloidal lithography is an effective and facile strategy for highly ordered nanostructure arrays that is a simple, inexpensive, and high-throughput process with a broad choice of materials in manufacturing various lithographically patterned nanostructures on substrates. To develop such nanostructured systems, various nanofabrication techniques are employed on two-dimensional (2D) colloidal masks for evaporation, electrochemical deposition, etching, dewetting and mask replication. Ordered nanostructures associated with feature shapes and sizes can be diversified through a choice of methodology and a control of experimental conditions. This review presents an overview of colloidal crystals as a mask and nanostructure arrays (nanopillars, nanoring, nanopores) fabricated by colloidal lithography as well as introducing practical applications using ordered nanostructures.
Keywords:Colloidal Crystal;Colloidal Lithography;Nanostructure;Nanopillar;Nanopore
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