화학공학소재연구정보센터
Applied Surface Science, Vol.261, 488-492, 2012
Irradiation of the graphite-like carbon films by ns-laser pulse
The effect of a nanosecond laser irradiation of graphite-like carbon (GLC) films deposited on Si substrate by the plasma jet technique was analyzed in this work. The GLC coatings were irradiated by the nanosecond Nd:YAG lasers operating at 1064 nm (infrared (IR) radiation) and 532 nm (visible (VIS) radiation), using a multi-shot regime. The laser irradiations lead to the surface ablation and partial disarrangement of the GLC coatings. The IR laser irradiation stimulates an increase in the fraction of the sp(2) carbon bonds and formation of the nano-graphite cluster. The formation of SiC and graphite nanocrystallites was observed after VIS laser radiation by 24 MW/cm(2) energy density. FTIR results demonstrated that the reflectance of the laser irradiated carbon films decreases. (C) 2012 Elsevier B. V. All rights reserved.