The surface of TA15 titanium alloy was modified by pulsed electron beam and the hardness distribution along the treated surface layer was investigated by nanoindent technology. The grade characteristics were therefore analyzed by studying the distribution of hardness along surface layer of specimens. Moreover, the microstructure was investigated by OM, XRD and TEM techniques. Furthermore, the correlation of hardness to microstructure was analyzed. The results show that the grade fine grain microstructure is formed in the upper surface layer and the temperature grade or heat effect caused by pulsed electron beam treatment is the main reason to form grade fine grain microstructure in the surface layer. (C) 2012 Elsevier B.V. All rights reserved.