Ag/TiO2 thin films have been prepared on glass substrates by the dip-coating technique and sol-gel process using a precursor solution containing titanium alkoxide and silver nitrate in an Ag/Ti atomic ratio of 1:6 and 1:100. These films were annealed at 100 degrees C and 400 degrees C and cooled rapidly to obtain silver nanoparticles dispersed in an amorphous TiO2 matrix, confirmed by X-ray diffraction (XRD) analyses. Ag/TiO2 nanocrystalline films were also prepared using slow cooling. Silver nanoparticles coalesced and migrated to the thin film surfaces with increasing annealing temperature as observed by high-resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM) and scanning probe microscopy (SPM). A transmission electron microscope (TEM) was used to induce phase transition in the amorphous matrix into anatase and rutile crystalline phases using a 200 kV electron beam. The variation of the Ag/Ti atomic ratio changed the plasmon resonance absorption and band gap values of the Ag/TiO2 films due to the change in the Ag nanoparticle sizes formed on the surface of films, as verified by UV-vis absorption spectroscopy and spectroscopic ellipsometry. (C) 2012 Elsevier B.V. All rights reserved.