Titanium alloy beta 21S with composition Ti-15Mo-3Nb-3Al-0.2Si was plasma nitrided using inductively coupled RF Plasma with 100% N-2 and 80% N-2-20% H-2 at 800 degrees C for 4 h. XRD and micro Raman studies show the formation of titanium nitrides. Potentiodynamic polarization studies in Hank's solution show the corrosion resistance of the 80-20% (N-2-H-2) treated samples to be better than the 100% N-2 treated samples. However, untreated samples show better corrosion resistance than the treated samples. Electrochemical impedance spectroscopy (EIS) studies show higher charge transfer resistance and lower double layer capacitance for the substrate compared to the nitrided samples. FESEM images of samples immersed in SBF show that growth of apatite is more and the size of deposits are larger on nitrided samples, especially on those nitrided with hydrogen dilution, as compared to that on the untreated substrate. EDS results show a decrease in nitrogen content and increase in oxygen content after corrosion experiments. XPS spectra from the nitrided and corrosion tested samples show the presence of oxide, nitride and oxynitride on the surface and after corrosion studies the samples are covered with oxide. Nitrided samples immersed in Hank's solution for one day show higher amount of calcium, phosphorous and oxygen in hydroxide form than the substrate. (C) 2012 Elsevier B.V. All rights reserved.