MoNx/SiNx multilayer coatings and MoNx coating were prepared with direct current magnetron sputtering system. The coatings were characterized by X-ray diffraction, transmission electron microscopy, nano-indentation and pin on disk tribotester. The X-ray diffraction and transmission electron microscopy results demonstrated, that phase of multilayer coatings were composed of gamma-Mo2N and amorphous SiNx. The MoNx coating showed higher microhardness of about 29 GPa than MoNx/SiNx multilayers about 27 GPa. The MoNx/SiNx multilayers show better tribological properties with lower friction coefficient of about 0.53 and higher wear resistance. The wear resistance of MoNx/SiNx multilayers was reduced with the microstructure change from crystalline to amorphous. (C) 2013 Elsevier B.V. All rights reserved.