Progress in materials science is inseparably connected with development of new analytical methods which make possible to observe the materials microstructure with high sensitivity. The aim of the present study is shown that scanning low energy electron microscopy (SLEEM) has a significant impact in advance of a fundamental understanding of the evolution of microstructure upon semi-solid processing. This paper deals with the application of the ultra high vacuum scanning low energy electron microscopy (UHV SLEEM) to the study of microstructure of X210Cr12 steel after the formation in semi-solid state and the study of the annealing of deformed metastable austenite. Examples from these specimens show that the contrast between differently oriented grains in polycrystalline materials is very sensitive to the parameters such as energy of the primary beam, working distance and detection of high angle backscattered electrons. (c) 2012 Elsevier B.V. All rights reserved.