The fabrication of sub-pm structures on glass fibre surfaces poses a big challenge for the laser processing. However, the laser-induced front side etching (LIFE) method has a great potential for the fast, nm-precision, and cost-effective production of surface structures. LIFE is a method for laser etching of transparent materials using thin absorber layers with a high absorption coefficient like metal layers. The LIFE process of the front surface of a fused silica wafer as well as of a glass fibre is studied in dependence on the laser parameters. A KrF excimer laser with a wavelength of 248 nm and a pulse duration of 25 ns was used. The resultant structures were analysed with microscopic methods (white light interferometry, scanning electron microscopy (SEM)). The analysing of the surface structures presented that the LIFE methods allow the fabrication of well-defined periodic sub-mu m structures. Furthermore, the structuring process was simulated by a thermodynamic equation including an approach of the laser-plasma interaction. The theoretically predicted results presented a good agreement with the experimental results. (C) 2014 Elsevier B.V. All rights reserved.