NO2 감지용 SnO2 후막소자의 제작 및 특성

손종락; 한종수

Journal of the Korean Industrial and Engineering Chemistry, Vol.8, No.2, 332-338, April, 1997

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NO2 감지용 SnO2 후막소자의 제작 및 특성

Fabrication and Characteristics of SnO₂ Thick Film Devices for Detection of NO₂

손종락, 한종수

초록

NO₂기체의 감지를 위한 sensor의 원료물질로 SnO₂를 사용하였으며 SnC1₄ 용액을 암모니아수로 침전시킨 후 공기중에 하소하여 SnO₂를 제조하였다. SnO₂의 특성을 XRD 및 IR로 연구하였으며 스크린-프린팅법으로 SnO₂후막소자를 제작하였다. 하소온도가 높을수록 SnO₂의 입자의 크기는 결정의 성장으로 증가하였다 1000℃에서 하소된 SnO₂분말을 가지고 만든 소자를 700℃에서 열처리하여 제작된 SnO₂ 소자는 동작온도 250℃에서 NO₂기체에 대한 우수한 감지특성과 선택성을 나타내었다.

SnO₂ as raw material of sensor for NO₂ detection was prepared by precipitating SnC1₄ solution with aqueous ammonia followed by calcining in air. The characterization of SnO₂ was carried out using FT-lR and XRD, and SnO₂ thick film sensor was fabricated by screen-printing method. The particle size of SnO₂ calcined at higher temperature increased due to the growth of crystalline. SnO₂ sensor fabricated by using SnO₂ sample calcined at 1000℃ followed by heat treatment at 700℃ exhibited excellent sensing characteristics and selectivity for NO₂ gas at the operating temperature of 250℃.

[References]

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Rube RH, J. Chem. Phys., 27, 496 (1957)
Dowden DA, J. Chem. Soc., 242 (1950)
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Jarzebski ZM, Marrton JP, J. Electrochem. Soc., 123, 199 (1976)
Adamson AW, "Physical Chemistry of Surfaces," John Wiley and Sons, New York, 517-521 (1982)
Sberveglieri G, Faglia G, Groppelli S, Nelli P, Sens. Actuators B-Chem., 2, 79 (1992)
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Colthup NB, Daly LH, Wiberly SE, "Introduction to Infrared and Raman Spectroscopy," Academic Press, New York (1964)
Ogawa H, J. Electrochem. Soc., 128, 2022 (1981)
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Raccanelli A, Maddalena A, J. Am. Ceram. Soc., 59, 425 (1976)
Winter ERS, J. Chem. Soc., 1522 (1954)
Barry TI, Stone FS, Proc. R. Soc. London, 255A, 124 (1960)
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[1] Taguchi T, U.S. Patent, 3,696 (1972)

[2] Mokawa W, Kohl D, Heiland G, Sens. Actuator, 8, 101 (1985)

[3] Eguchi K, Cauhane JS, Lucat C, Videau JJ, Sens. Actuator, 17, 319 (1989)

[4] Weixin Z, Lingjuan Z, Sens. Actuator, 19, 177 (1989)

[5] Schierbaum KD, Sens. Actuator, 1, 171 (1989)

[6] Coles GSV, Williams G, Sens. Actuator, 3, 7 (1991)

[7] Anderson JR, Boudact M, "Catalysis Science and Technology," 3, Springer Verlag, Berlin Heidel-berg, New York (1982)

[8] Sales BC, Surf. Sci., 112, 272 (1981)

[9] Talor HS, Ogden G, Trans. Faraday Soc., 30, 1178 (1934)

[10] Elvoich SJ, Zhur. Fiz. Khim., 13(1961), 1775 (1939)

[11] Benard J, Smith AE, Proc. Roy. Soc., A177, 62 (1940)

[12] Rube RH, J. Chem. Phys., 27, 496 (1957)

[13] Dowden DA, J. Chem. Soc., 242 (1950)

[14] Low MJD, Taylor HA, J. Electrochem. Soc., 106, 138 (1957)

[15] Jarzebski ZM, Marrton JP, J. Electrochem. Soc., 123, 199 (1976)

[16] Adamson AW, "Physical Chemistry of Surfaces," John Wiley and Sons, New York, 517-521 (1982)

[17] Sberveglieri G, Faglia G, Groppelli S, Nelli P, Sens. Actuators B-Chem., 2, 79 (1992)

[18] Yagi I, Kaneko S, Chem. Lett., 2345 (1992)

[19] Colthup NB, Daly LH, Wiberly SE, "Introduction to Infrared and Raman Spectroscopy," Academic Press, New York (1964)

[20] Ogawa H, J. Electrochem. Soc., 128, 2022 (1981)

[21] Thomton EW, Harrison PG, J. Chem. Soc.-Faraday Trans., 71, 461 (1975)

[22] Raccanelli A, Maddalena A, J. Am. Ceram. Soc., 59, 425 (1976)

[23] Winter ERS, J. Chem. Soc., 1522 (1954)

[24] Barry TI, Stone FS, Proc. R. Soc. London, 255A, 124 (1960)

[25] Glemza R, Kokes RJ, J. Catal., 3, 156 (1979)