The pervaporative mass transfer of pure ethanol and water through a thin (0.5 mu m) supported high-silica MFI membrane was studied experimentally at 30-70 degrees C, and modeled on the basis of the Maxwell-Stefan formalism. The temperature dependency of adsorption was described with the temperature dependency of pure component saturated vapor pressure. Two scenarios of coverage dependency, i.e., coverage-dependent and coverage-independent Maxwell-Stefan diffusivity, were applied in the modeling of the mass transfer through the zeolite film. In addition, the mass-transfer resistance of the support layers was taken into account. The derived unary models provided good representations of ethanol and water pervaporation flux. The study illustrates that pure component steady-state pervaporation flux measurements at different conditions offer a feasible basis for determining diffusion coefficients. Basically, pure component adsorption isotherms and derived diffusivities can be used in the modeling of pervaporative mass transfer of mixtures using zeolite membranes.