Nascent state-resolved ClO(X (2) Pi) radicals produced in reactions of O(D-1) with HCl, CCl4, CFCl3, CF2Cl2, and CF3Cl have been measured, using vacuum-ultraviolet laser-induced fluorescence of the ClO(C (2) Sigma(-) -X (2) Pi) transition. Rotational temperatures of ClO(X (2) Pi(3/2), upsilon=0 and 1) are 900-1000 K for chlorofluoromethanes and 2050+/-60 K (upsilon=0) and 1770+/-180 K (upsilon=1) for HCl. The rotational distribution for the O(D-1)+HCl system is interpreted by the orbital-to-rotational angular momentum transfer mechanism. Vibrational level populations of the ClO(upsilon=0-3) products are inverted for CCl4 and chlorofluoromethanes, but not for HCl. Vibrational excitations in the upsilon=0-3 levels are higher for the reactions with the larger available energies.