Journal of Chemical Physics, Vol.105, No.5, 2066-2075, 1996
Hyperthermal H Atom Interactions with D/Si(100) - Effects of Incident H Atom Kinetic-Energy on the Removal of Adsorbed D
The interactions of H atoms having hyperthermal energies with a monodeuteride-terminated Si(100) surface are investigated. H atoms having mean kinetic energies of 1.0 and 2.9 eV are generated by 248 and 193 nm laser photolysis, respectively, of a pulsed, free-jet expansion of HI. Full characterization of the laser photolysis conditions allows the determination of the relative, as well as absolute, H atom exposures for these two kinetic energies. The depletion probability of adsorbed D per incident H atom is identical for species having incident kinetic energies of 1.0 and 2.9 eV and has an absolute value of 0.3 +/- 0.2.
Keywords:SI(100) SURFACE;HYDROGEN DESORPTION;EXCHANGE-REACTIONS;SI(111) SURFACES;ABSTRACTION;ADSORPTION;DYNAMICS;SILICON;PHOTOLYSIS;HCL