The global environmental problems have been caused by the release of CFCs. Therefore, methods for safe destruction of recoverd CFCs will be eventually needed. The objective of this study was to develop and test a catalyst operating at a mild condition for the decomposition of CFC-113. In this work, catalytic oxidative decomposition of CFC-113 was carried out over aerosol TiO₂/SiO₂(ATS) catalysts prepared by the sol-gel method. All ATS catalysts(Ti/Si mol ratio = 1, 2, 2.33, 4) showed high initial activity. However, the deactivation of ATS catalysts was found that more remarkable due to an attack of fluorine and the destruction of ATS structure(Si-F reaction)from analyses of SEM-EDX, XRD than TiO₂/SiO₂(ATS) catalyst prepared by the precipitation method. ATS catalysts prepared by more acidic prehydrolysis condition were found to have still more activity and longer life-time by increasing of acidity. The activity of ATS catalyst also depend on the content of TiO₂. There was reason that the acidity of the ATS catalyst was increased with the increased content of TiO₂ from 50 to 80 mol %. Solid superacid catalyst (ATS/SO₄^2-) modified with H₂SO₄ solution was prepared for high activity and lower deactivation. The reaction of ATS/SO₄^2- catalyst also exhibited even higher activity and lower deactivation than the original ATS catalyst. It is suggested that the addition of the sulphate species clearly inhibit the deactivation.