Plasma Display Panel용 감광성 격벽 재료 및 Photolithography 공정 성질

박이순; 정승원; 오현식; 김순학; 송상무

Journal of the Korean Industrial and Engineering Chemistry, Vol.10, No.8, 1114-1118, December, 1999

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Plasma Display Panel용 감광성 격벽 재료 및 Photolithography 공정 성질

Photosensitive Barrier Rib Paste for PDP and Photolithographic Process

박이순, 정승원, 오현식, 김순학, 송상무

초록

플라즈마 디스플레이 패널(PDP)의 격벽(barrier rib)은 일정한 선폭과 높이를 가져 균일한 방전 공간을 제공하고, 인접한 셀 간의 전기적, 광학적 혼선(crosstalk)을 방지하기 위해 PDP의 하부 유리 기판 패널에 들어가는 구조물이다. 본 연구에서는 사진식각(photolithography)법으로 격벽을 형성하는데 필요한 감광성 격벽 페이스트가 제조되었다. 페이스트는 바인더 고분자인 에틸셀룰로오즈를 BC/BCA = 30/70 wt %인 혼합 용매에 15 wt %로 용해한 다음 관능성 단량체로서TPGDA/PETA = 50/50 wt % 혼합물, 광개시제로서 Irgacur 651 및 격벽 분말을 도입한 다음 전체를 균일하게 분산시켜 제조하였다. 감광성 격벽 페이스트의 각 성분, 조성 및 공정을 최적화하여 소성 후 높이 약 100㎛ 에 이르는 PDP용 격벽을 고해상도로 사진식각법으로 얻을 수 있었다

Barrier rib for the plasma display panel(PDP) was made by photolithographic process utilizing photosensitive barrier rib paste. The barrier rib paste was prepared by first dissolving ethylcellulose(binder polymer) in butyl carbitol(BC)/butyl carbitol acetate(BCA) =30/70 wt % mixture solvent at 15 wt % concentration. To this solution a mixture of functional monomers consisted of tripropyleneglycol diacrylate/ pentaerythritol triacrylate = 50/50 wt %, Irgacur 651 photoinitiator, and barrier rib powder were added and then the whole mixture was mixed in the three roll mill for 2 hr. The effect of component and concentration of photosensitive barrier paste on the photolithographic process was studied. After optimizztion of the paste formulation and photolithographic process, barrier rib could be obtained with good resolution up to 100 m height.

Keywords:plasma display panel(PDP);photosensitive barrier rib;photolithography;barrier rib;barrier rib paste

[References]

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[1] Jackson RN, Johnson KE, Advances in Electronics and Electron Physics, Academic, New York, p. 191 (1974)

[2] Decker C, "Radiation Curing in Polymer Science and Technology," Vol. III: Polymerization Mechanism p. 33 (1993)

[3] "Flat Panel Display," PDP Technology, p. 202 (1997)

[4] 阪本進, "Technology & Materials of Color Plasma Display Panel," Shiomusi, p. 88 (1996)

[5] 佐野康, "最新プラズマディスプレイ製造技術," Press Journal, p. 108, p. 173 (1997)

[6] Andrzejewska E, Andrzejewski M, J. Polym. Sci. A: Polym. Chem., 36(4), 665 (1998)

[7] Decker C, Moussa K, Macromol. Chem. Rapido Commun., 11, 159 (1990)

[8] Lay FM, Chu CK, J. Appl. Phys., 44, 4008 (1973)

[9] Decker C, Moussa K, Macromol. Chem. Rapido Commun., 192, 507 (1991)

[10] U.S. Patent, 5,806,297 (1992)

[11] U.S. Patent, 5,703,433 (1997)

[12] "Encyclopedia of Polymer Science and Engineering," Wiley-Interscience, 2nd Ed., Vol. 3, p. 226 (1985)

[13] 浜田康夫, "最新プラズマディスプレイ製造技術," Press Journal, p. 277 (1997)