The method of preparation of thin foil Ti-Ni-Pd alloy membranes with 2, 5 and 9 wt% of Pd was developed and the phase content and hydrogen permeability of membranes were studied. It was found that Pd adding into Ti-Ni alloy increases the hydrogen permeability of the foils. Thus, the permeability of the foil with 9% of Pd was about one order of magnitude higher than that of the Ti-Ni foil. Cyclohexane dehydrogenation on Pt-Re/Al2O3 commercial catalyst carried out in a flow reactor with a Ti-Ni-Pd membrane shows the higher conversions than those of a reactor without membrane due to the hydrogen permeability through the membrane. (c) 2007 International Association for Hydrogen Energy. Published by Elsevier Ltd. All rights reserved.